Three-dimensional subsurface imaging with laser ablation/AFM

Ilmar Kink; R. Lohmus; M. Adamovich; R. Jaaniso; K. Saal; M. Lobjakas; A. Lohmus

doi:10.1117/12.517032

8 August 2003 Three-dimensional subsurface imaging with laser ablation/AFM

Ilmar Kink, R. Lohmus, M. Adamovich, R. Jaaniso, K. Saal, M. Lobjakas, A. Lohmus

Proceedings Volume 5123, Advanced Optical Devices, Technologies, and Medical Applications; (2003) https://doi.org/10.1117/12.517032
Event: 2003 Chapter books, 2003, Bellingham, WA, United States

Abstract

New method for 3D nano-scale imaging was developed that combines a traditional scanning probe techniques with a local laser ablation processing of the surface of a sample. The technology opens new possibilities for ultra precise (down to atomic resolution) subsurface studies, whereas the traditional SPM sensitivity is limited to only few atomic layers. We demonstrate that our new experimental set-up can also be used for other investigations, e.g. in in situ characterization of surface processing. The approach is potentially interesting for many applications, like volume nano-imaging, in situ studies of a stimulated nano-assembling or growth, monitoring of laser processing and cleaning, etc.

Citation Download Citation

Ilmar Kink, R. Lohmus, M. Adamovich, R. Jaaniso, K. Saal, M. Lobjakas, and A. Lohmus "Three-dimensional subsurface imaging with laser ablation/AFM", Proc. SPIE 5123, Advanced Optical Devices, Technologies, and Medical Applications, (8 August 2003); https://doi.org/10.1117/12.517032

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