3D deformation analysis of flow and gas sensors membranes for reliability assessment

Neus Sabate; Juergen Keller; Astrid Gollhardt; Dietmar Vogel; Isabel Gracia; Carles Cane; Joan Ramon Morante; Bernd Michel

doi:10.1117/12.608660

1 July 2005 3D deformation analysis of flow and gas sensors membranes for reliability assessment

Neus Sabate, Juergen Keller, Astrid Gollhardt, Dietmar Vogel, Isabel Gracia, Carles Cane, Joan Ramon Morante, Bernd Michel

Author Affiliations +

Proceedings Volume 5836, Smart Sensors, Actuators, and MEMS II; (2005) https://doi.org/10.1117/12.608660
Event: Microtechnologies for the New Millennium 2005, 2005, Sevilla, Spain

Abstract

Micromachined microsensors for gas or flow detection based on physical behaviour of a special layer of a membrane have to fulfil high quality and reliability requirements especially in safety or security applications. For the reliability assessment a combination of simulative and experimental methods is usually carried out for the fully understanding of the thermo-mechanical behaviour. Due to the micromachining involved in the production of the sensor components the thermo-mechanical response of the layers are strongly dependent on process parameters. Therefore experimental methods for the 3D deformation detection are essential. In this paper experimental methods such as profilometry and scanning probe microscopy are tested for the evaluation of residual stresses and thermomechanical induced stress/strain fields.

Citation Download Citation

Neus Sabate, Juergen Keller, Astrid Gollhardt, Dietmar Vogel, Isabel Gracia, Carles Cane, Joan Ramon Morante, and Bernd Michel "3D deformation analysis of flow and gas sensors membranes for reliability assessment", Proc. SPIE 5836, Smart Sensors, Actuators, and MEMS II, (1 July 2005); https://doi.org/10.1117/12.608660

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available