A curvature sensor using white-light scanning interferometry

ByoungChang Kim; SeHeon Kim; YongKwan Kwon; YunWoo Lee; HoSoon Yang; HyugGyo Rhee

doi:10.1117/12.675925

14 August 2006 A curvature sensor using white-light scanning interferometry

ByoungChang Kim, SeHeon Kim, YongKwan Kwon, YunWoo Lee, HoSoon Yang, HyugGyo Rhee

Proceedings Volume 6292, Interferometry XIII: Techniques and Analysis; 629219 (2006) https://doi.org/10.1117/12.675925
Event: SPIE Optics + Photonics, 2006, San Diego, California, United States

Abstract

We present a method of free-form surface profile measurement using white-light scanning interferometry. This method is based on the principle of curvature sensor which measures the local curvature under test along a line. The profile is then reconstructed from the curvature data on the each point. Unlike subaperture-stiching method and slope detection method curvature sensing have strong points from a geometric point of view in measuring the free-form surface profile. Curvature is related to second derivative terms of surface profile and an intrinsic property of the test piece, which is independent of its position and tip-tilt motion. The curvature is measured at every local area with high accuracy and high lateral resolution by using White-light scanning interferometry.

Citation Download Citation

ByoungChang Kim, SeHeon Kim, YongKwan Kwon, YunWoo Lee, HoSoon Yang, and HyugGyo Rhee "A curvature sensor using white-light scanning interferometry", Proc. SPIE 6292, Interferometry XIII: Techniques and Analysis, 629219 (14 August 2006); https://doi.org/10.1117/12.675925

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available