Improved Au/Zn/Au ohmic contacts for p-type InP

Kefeng Zhang; Hengjing Tang; Xiaoli Wu; Jintong Xu; Xue Li; Haimei Gong

doi:10.1117/12.790778

4 March 2008 Improved Au/Zn/Au ohmic contacts for p-type InP

Kefeng Zhang, Hengjing Tang, Xiaoli Wu, Jintong Xu, Xue Li, Haimei Gong

Proceedings Volume 6621, International Symposium on Photoelectronic Detection and Imaging 2007: Photoelectronic Imaging and Detection; 662118 (2008) https://doi.org/10.1117/12.790778
Event: International Symposium on Photoelectronic Detection and Imaging: Technology and Applications 2007, 2007, Beijing, China

Abstract

In this work, an innovated Si₃N₄ as an out-diffusion barrier layer to Au/Zn/Au contact system for p-type InP has been proposed. Before the contacts were annealed, Si₃N₄ layer was deposited on the Au(200Å)/Zn(700Å)/Au(200Å), then the Si₃N₄ was removed by HF and a 2000A layer of pure gold was deposited to facilitate wire bonding. The specific contact resistance dropped to a minimum value of 6×10^-7 Ω • cm² (for an acceptor concentration of about 3×10¹⁸ cm^-3) and the contact became perfectly Ohmic. Besides, Si₃N₄ layer is an excellent passivation layer and antireflection coating in InP/InGaAs/InP (p-i-n) photodiodes.

Citation Download Citation

Kefeng Zhang, Hengjing Tang, Xiaoli Wu, Jintong Xu, Xue Li, and Haimei Gong "Improved Au/Zn/Au ohmic contacts for p-type InP", Proc. SPIE 6621, International Symposium on Photoelectronic Detection and Imaging 2007: Photoelectronic Imaging and Detection, 662118 (4 March 2008); https://doi.org/10.1117/12.790778

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available