Using the AIMS 45-193i for hyper-NA imaging applications

Peter De Bisschop; Vicky Philipsen; Robert Birkner; Ute Buttgereit; Rigo Richter; Thomas Scherübl

doi:10.1117/12.746688

30 October 2007 Using the AIMS 45-193i for hyper-NA imaging applications

Peter De Bisschop, Vicky Philipsen, Robert Birkner, Ute Buttgereit, Rigo Richter, Thomas Scherübl

Proceedings Volume 6730, Photomask Technology 2007; 67301G (2007) https://doi.org/10.1117/12.746688
Event: SPIE Photomask Technology, 2007, Monterey, California, United States

Abstract

We have tested the validity of the so-called 'vector-effect emulation mode' of the newest member of the AIMS^TM family, the AIMS^TM45-193i, that was recently developed for Hyper-NA applications. This vector-effect emulation mode (also called 'scanner mode') converts the measured signals into a prediction of what the image-in-resist of a Hyper-NA scanner would be (so including vector- and polarization effects). We've done a number of experiments that directly test the validity of this vector-effect emulation, by comparing them to rigorous lithographic simulations and to CD-measurements from printed NA=1.20 scanner wafers, and found that the AIMS^TM 45-193i results are in fact quite accurate. Afterwards we looked at a number of potential Hyper-NA imaging applications for the AIMS^TM 45-193i, again comparing it to rigorous simulations and wafer CD-measurements. These results indicate that, next to its traditional use as reticle-inspection tool, the AIMS^TM 45-193i has potential use also in the wafer fab as an 'imaging-inspection' or 'OPC-defect inspection' tool, especially when applied to 2D patterns.

Citation Download Citation

Peter De Bisschop, Vicky Philipsen, Robert Birkner, Ute Buttgereit, Rigo Richter, and Thomas Scherübl "Using the AIMS 45-193i for hyper-NA imaging applications", Proc. SPIE 6730, Photomask Technology 2007, 67301G (30 October 2007); https://doi.org/10.1117/12.746688

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available