EUV mask process development using DUV inspection system

David Kim; Venu Vellanki; William Huang; Andrew Cao; Chunlin Chen; Aditya Dayal; Paul Yu; Ki Hun Park; Yumiko Maenaka; Kazuko Jochi; Gregg Inderhees

doi:10.1117/12.747163

30 October 2007 EUV mask process development using DUV inspection system

David Kim, Venu Vellanki, William Huang, Andrew Cao, Chunlin Chen, Aditya Dayal, Paul Yu, Ki Hun Park, Yumiko Maenaka, Kazuko Jochi, Gregg Inderhees

Author Affiliations +

Proceedings Volume 6730, Photomask Technology 2007; 67305M (2007) https://doi.org/10.1117/12.747163
Event: SPIE Photomask Technology, 2007, Monterey, California, United States

Abstract

As the design rule continues to shrink towards 3x nm and below, lithographers are searching for new and advanced methods of mask lithography such as immersion, double patterning and extreme ultraviolet lithography (EUVL). EUV lithography is one of the leading candidates for the next generation lithography technologies after 193 nm immersion and many mask makers and equipment makers have focused on stabilizing the process. With EUV lithography just around the corner, it is crucial for advanced mask makers to develop and stabilize EUV mask processes. As a result, an inspection tool is required to monitor and provide quick feedback to each process step.

Citation Download Citation

David Kim, Venu Vellanki, William Huang, Andrew Cao, Chunlin Chen, Aditya Dayal, Paul Yu, Ki Hun Park, Yumiko Maenaka, Kazuko Jochi, and Gregg Inderhees "EUV mask process development using DUV inspection system", Proc. SPIE 6730, Photomask Technology 2007, 67305M (30 October 2007); https://doi.org/10.1117/12.747163

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available