Contrastive study on the mechanical performance of MEMS microsprings fabricated by LIGA and UV-LIGA technology

Hua Li; Gengchen Shi

doi:10.1117/12.756048

4 January 2008 Contrastive study on the mechanical performance of MEMS microsprings fabricated by LIGA and UV-LIGA technology

Hua Li, Gengchen Shi

Author Affiliations +

Proceedings Volume 6836, MEMS/MOEMS Technologies and Applications III; 68360E (2008) https://doi.org/10.1117/12.756048
Event: Photonics Asia 2007, 2007, Beijing, China

Abstract

With good mechanical performance and mature fabrication technology of LIGA and UV-LIGA, Ni is chosen as the material of S style MEMS microspring. At 24°C and 25% relative humidity, five different points in LIGA Ni sample were tested with the MICRO HARDNESS TESTER, and the Young's modulus was 219GPa. From the tensile tests of UV-LIGA Ni sample the Young's modulus of UV-LIGA Ni is 180GPa. The S style microspring was fabricated by LIGA and UV-LIGA technology separately. Applying the Castigliano second theorem of energy method in macro theory, the spring constant formulas of S style microspring in three application modes were deduced, and the correctness was verified by the FEA (Finite Element Analysis) simulation. The experiments of S style microspring's deformation properties were carried out by the Tytron250 micro force test machine and a tensile measurement system separately. The experimental results agree with the theoretical analysis. Based on the above analysis, the change laws of microspring's spring coefficient in different application patters are summarized.

Citation Download Citation

Hua Li and Gengchen Shi "Contrastive study on the mechanical performance of MEMS microsprings fabricated by LIGA and UV-LIGA technology", Proc. SPIE 6836, MEMS/MOEMS Technologies and Applications III, 68360E (4 January 2008); https://doi.org/10.1117/12.756048

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