Recent progress in understanding the imaging and metrology using the helium ion microscope

Michael T. Postek; Andras E. Vladar; Bin Ming

doi:10.1117/12.824533

22 May 2009 Recent progress in understanding the imaging and metrology using the helium ion microscope

Michael T. Postek, Andras E. Vladar, Bin Ming

Proceedings Volume 7378, Scanning Microscopy 2009; 737808 (2009) https://doi.org/10.1117/12.824533
Event: SPIE Scanning Microscopy, 2009, Monterey, California, United States

Abstract

Nanotechnology is pushing imaging and measurement instrument technology to high levels of required performance. As this continues, new barriers confronting innovation in this field are encountered. Particle beam instrument resolution remains one of these barriers. A new tool for imaging and metrology for nanotechnology is the scanning Helium Ion Microscope (HIM). The HIM is a new approach to imaging and metrology for nanotechnology which may be able to push this barrier lower. As a new methodology, it is just beginning to show promise and the number of potentially advantageous applications for nanotechnology and nanometrology has yet to be fully exploited. This presentation will discuss some of the progress made at NIST in collaboration with the manufacturing community in understanding the imaging and metrology for this new technology.

Citation Download Citation

Michael T. Postek, Andras E. Vladar, and Bin Ming "Recent progress in understanding the imaging and metrology using the helium ion microscope", Proc. SPIE 7378, Scanning Microscopy 2009, 737808 (22 May 2009); https://doi.org/10.1117/12.824533

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available