1Japan Chemical Innovation Institute (Japan) 2Seiko Epson Corp. (Japan) 3Ricoh Co., Ltd. (Japan) 4National Institute of Advanced Industrial Science and Technology (Japan)
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Microcontact printing (μCP) was successfully used to micropattern electrodes on large area substrates. An A4-size (210
mm × 297 mm) polydimethylsiloxane (PDMS) elastomer stamp was easily fabricated using an electroformed nickel
mold. The micropatterns of poly(3,4-ethylenedioxythiophene)/poly(4-stylenesulfonate) (PEDOT/PSS) and silver (Ag)
thin films, which were under 10 μm in width, were fabricated by transferring the thin films on the PDMS elastomer
stamp to another substrate by μCP. Bottom contact (BC) organic thin film transistors (OTFTs) with PEDOT/PSS were
fabricated as source and drain electrodes. The successful operation of fabricated OTFTs with a channel length of 10 μm
was demonstrated. Results show that μCP is a promising process for use with various devices that require
micropatterning on large area substrates.
Atsushi Takakuwa,Takeshi Shibuya, andKiyoshi Yase
"Electrode micropatterning by microcontact printing method to large area substrates using nickel mold", Proc. SPIE 7590, Micromachining and Microfabrication Process Technology XV, 75900N (17 February 2010); https://doi.org/10.1117/12.840588
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Atsushi Takakuwa, Takeshi Shibuya, Kiyoshi Yase, "Electrode micropatterning by microcontact printing method to large area substrates using nickel mold," Proc. SPIE 7590, Micromachining and Microfabrication Process Technology XV, 75900N (17 February 2010); https://doi.org/10.1117/12.840588