Paper
21 August 1987 Esr And The Density Of Deep Gap States In A-Si:H
P. C. Taylor, C. Lee, W. D. Ohlsen
Author Affiliations +
Proceedings Volume 0763, Physics of Amorphous Semiconductor Devices; (1987) https://doi.org/10.1117/12.940155
Event: OE LASE'87 and EO Imaging Symposium, 1987, Los Angeles, CA, United States
Abstract
Electron spin resonance (ESR) is an important tool for providing detailed microscopic information about electronic states located within the energy gap in hydrogeated amorphous silicon (a-Si:H). There always exists an ESR signal in a-Si:H on the order of 1015 spins cm-3 which is attributed to silicon dangling bonds. After optical excitation with band-gap light, a metastable increase in the dangling bond ESR signal is observed. After rapid quenching of a sample from -200°C to room temperature, there is also an increase in the ESR signal with time (without optical excitation) as the sample approaches thermal equilibrium.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
P. C. Taylor, C. Lee, and W. D. Ohlsen "Esr And The Density Of Deep Gap States In A-Si:H", Proc. SPIE 0763, Physics of Amorphous Semiconductor Devices, (21 August 1987); https://doi.org/10.1117/12.940155
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KEYWORDS
Silicon

Chemical species

Physics

Temperature metrology

Amorphous semiconductors

Annealing

Interfaces

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