Research of electromagnetic drive micromechanical gyroscope based on tunneling effect of multi-barrier nano thin films

Kang Du; Ruirong Wang; Mengwei Li; Jun Liu; Yunbo Shi

doi:10.1117/12.865461

12 October 2010 Research of electromagnetic drive micromechanical gyroscope based on tunneling effect of multi-barrier nano thin films

Kang Du, Ruirong Wang, Mengwei Li, Jun Liu, Yunbo Shi

Author Affiliations +

Proceedings Volume 7659, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Smart Structures and Materials in Manufacturing and Testing; 765916 (2010) https://doi.org/10.1117/12.865461
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

Multi-barrier nano-thin films device is a new device based on the quantum tunneling effect. This kind of device has piezoresistive effect and the piezoresistive sensitivity is about one order than that of silicon piezoresistive device. Thin film device fabricated by using molecular beam epitaxy (MBE) has the advantages of small temperature drift compared with the doped devices. Comparing with the electrostatic comb-drive mode, the electromagnetic driving approach is not only with simple structure and easy to fabrication, but also can achieve large displacement-driven. These two methods applied to the study of gyroscope can improve the sensitivity in essence. In this paper, a novel gyroscope structure with folding-type orthogonal beams is designed which is not only meet the drive approach, but also meet the detection conditions. The nano thin films device and gyroscope structure are fabricated by the GaAs surface micromachining and GaAs bulk micromachining processes respectively. The preliminary measurement results prove that the gyroscope design is feasible.

Citation Download Citation

Kang Du, Ruirong Wang, Mengwei Li, Jun Liu, and Yunbo Shi "Research of electromagnetic drive micromechanical gyroscope based on tunneling effect of multi-barrier nano thin films", Proc. SPIE 7659, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Smart Structures and Materials in Manufacturing and Testing, 765916 (12 October 2010); https://doi.org/10.1117/12.865461

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