Advances in modeling of scanning charged-particle-microscopy images

Petr Cizmar; András E. Vladár; Michael T. Postek

doi:10.1117/12.861064

3 June 2010 Advances in modeling of scanning charged-particle-microscopy images

Petr Cizmar, András E. Vladár, Michael T. Postek

Proceedings Volume 7729, Scanning Microscopy 2010; 77290Z (2010) https://doi.org/10.1117/12.861064
Event: Scanning Microscopy 2010, 2010, Monterey, California, United States

Abstract

Modeling artificial scanning electron microscope (SEM) and scanning ion microscope images has recently become important. This is because of the need to provide repeatable images with a priori determined parameters. Modeled artificial images are highly useful in the evaluation of new imaging and metrological techniques, like image-sharpness calculation, or drift-corrected image composition (DCIC). Originally, the NIST-developed artificial image generator was designed only to produce the SEM images of gold-on-carbon resolution sample for image-sharpness evaluation. Since then, the new improved version of the software was written in C++ programming language and is in the Public Domain. The current version of the software can generate arbitrary samples, any drift function, and many other features. This work describes scanning in charged-particle microscopes, which is applied both in the artificial image generator and the DCIC technique. As an example, the performance of the DCIC technique is demonstrated.

Citation Download Citation

Petr Cizmar, András E. Vladár, and Michael T. Postek "Advances in modeling of scanning charged-particle-microscopy images", Proc. SPIE 7729, Scanning Microscopy 2010, 77290Z (3 June 2010); https://doi.org/10.1117/12.861064

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