Metrics of resolution and performance for CD-SEMs

David C. Joy; Yeong-Uk Ko; Justin J. Hwu

doi:10.1117/12.386444

2 June 2000 Metrics of resolution and performance for CD-SEMs

David C. Joy, Yeong-Uk Ko, Justin J. Hwu

Proceedings Volume 3998, Metrology, Inspection, and Process Control for Microlithography XIV; (2000) https://doi.org/10.1117/12.386444
Event: Microlithography 2000, 2000, Santa Clara, CA, United States

Abstract

The performance of scanning electron beam instruments such as CD-SEMs can be defined in terms of parameters such as the beam probe size, the spatial resolution, and the signal to noise ratio of the image. A knowledge of these quantities is important in verifying the fact that an instrument meets its specification, and subsequently for tracking and optimizing its performance during use. Analytical methods based on the power spectrum (2-D Fourier transform analysis) of images are now beginning to be used for these purposes but care must be exercised to ensure reliable and meaningful results. Two new methods are suggested which can offer more detailed information about the microscope performance while avoiding the pitfalls of the simpler technique. Code implementing these tests, written as a plug-in macro for the well known NIH Image program, is available on-line.

Citation Download Citation

David C. Joy, Yeong-Uk Ko, and Justin J. Hwu "Metrics of resolution and performance for CD-SEMs", Proc. SPIE 3998, Metrology, Inspection, and Process Control for Microlithography XIV, (2 June 2000); https://doi.org/10.1117/12.386444

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available