High-speed atmospheric imaging of semiconductor wafers using rapid probe microscopy

Priyanka Kohli; Jeff Lyons; Andrew D. L. Humphris; Benjamin D. Bunday; Abraham Arceo; Akira Hamaguchi; Dilip Patel; David Bakker

doi:10.1117/12.879456

20 April 2011 High-speed atmospheric imaging of semiconductor wafers using rapid probe microscopy

Priyanka Kohli, Jeff Lyons, Andrew D. L. Humphris, Benjamin D. Bunday, Abraham Arceo, Akira Hamaguchi, Dilip Patel, David Bakker

Author Affiliations +

Proceedings Volume 7971, Metrology, Inspection, and Process Control for Microlithography XXV; 797119 (2011) https://doi.org/10.1117/12.879456
Event: SPIE Advanced Lithography, 2011, San Jose, California, United States

Abstract

The aggressive device scaling imposed by the International Technology Roadmap for Semiconductors (ITRS) is introducing additional and more demanding challenges to current in-line monitoring tools. In this paper we present a new probe microscopy based technology, the Rapid Probe Microscope (RPM), which produces nano-scale images using a height contrast mechanism in a non-vacuum environment. The system offers the possibility to address metrology challenges in alternative ways to existing review and inspection tools. This paper presents applications of the RPM process which cater to the requirements of the semiconductor industry. Results on several standard semiconductor wafer layers have been used to demonstrate the capabilities of the RPM process, including nano-scale surface imaging at high image capture rates.

Citation Download Citation

Priyanka Kohli, Jeff Lyons, Andrew D. L. Humphris, Benjamin D. Bunday, Abraham Arceo, Akira Hamaguchi, Dilip Patel, and David Bakker "High-speed atmospheric imaging of semiconductor wafers using rapid probe microscopy", Proc. SPIE 7971, Metrology, Inspection, and Process Control for Microlithography XXV, 797119 (20 April 2011); https://doi.org/10.1117/12.879456

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available