Aspherical surface measurement using quadri-wave lateral shearing interferometry

William Boucher; Pascal Delage; Benoit Wattellier

doi:10.1117/12.895005

26 May 2011 Aspherical surface measurement using quadri-wave lateral shearing interferometry

William Boucher, Pascal Delage, Benoit Wattellier

Proceedings Volume 8082, Optical Measurement Systems for Industrial Inspection VII; 80821E (2011) https://doi.org/10.1117/12.895005
Event: SPIE Optical Metrology, 2011, Munich, Germany

Abstract

Aspherical surfaces are characterized in reflection using a quadri-wave lateral shearing interferometer (QWLSI). This measures the deformation of a reference source due to the reflection on an aspherical shape. Thanks to the wave front sensor high dynamic range, aspherical sags as large as 100 μm are achieved.

Citation Download Citation

William Boucher, Pascal Delage, and Benoit Wattellier "Aspherical surface measurement using quadri-wave lateral shearing interferometry", Proc. SPIE 8082, Optical Measurement Systems for Industrial Inspection VII, 80821E (26 May 2011); https://doi.org/10.1117/12.895005

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