Combination of a nano-coordinate measuring machine with a low-coherent digital holographic microscopy sensor for large-scale measurements

S. Stuerwald; R. Schmitt

doi:10.1117/12.910788

23 December 2011 Combination of a nano-coordinate measuring machine with a low-coherent digital holographic microscopy sensor for large-scale measurements

S. Stuerwald, R. Schmitt

Author Affiliations +

Proceedings Volume 8204, Smart Nano-Micro Materials and Devices; 82043U (2011) https://doi.org/10.1117/12.910788
Event: SPIE Smart Nano + Micro Materials and Devices, 2011, Melbourne, Australia

Abstract

A variety of microscopy techniques allow measuring different local physical properties of a surface under test. One of the key properties of interest in production and development of micro- and nano components is a nanometer resolution even in a measurement range of a few centimeters. By integrating a low coherent digital holographic microscope (DHM) into a coordinate measuring machine with sub nanometer resolution and nanometer uncertainty, a DHM with an outstanding measuring range is realized which enables simultaneous investigation of form and roughness of specimens with sizes up to 25 mm×25 mm×5mm along the x, y and z-axes. Different modes of scanning strategies have been analyzed and error compensated for micro and nano structured optical components with a surface diameter up to 25mm. For calculation of the correlation and thus effective coherence length, which is used for analysis of the topography of the specimen, a comprehensive theoretical approach is demonstrated and experimentally verified.

Citation Download Citation

S. Stuerwald and R. Schmitt "Combination of a nano-coordinate measuring machine with a low-coherent digital holographic microscopy sensor for large-scale measurements", Proc. SPIE 8204, Smart Nano-Micro Materials and Devices, 82043U (23 December 2011); https://doi.org/10.1117/12.910788

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