Paper
6 February 2012 Top-down fabrication of GaN-based nanorod LEDs and lasers
George T. Wang, Qiming Li, Jonathan Wierer, Jeffrey Figiel, Jeremy B. Wright, Ting S. Luk, Igal Brener
Author Affiliations +
Abstract
Although planar heterostructures dominate current optoelectronic architectures, 1D nanowires and nanorods have distinct and advantageous properties that may enable higher efficiency, longer wavelength, and cheaper devices. We have developed a top-down approach for fabricating ordered arrays of high quality GaN-based nanorods with controllable height, pitch and diameter. This approach avoids many of the limitations of bottom-up synthesis methods. In addition to GaN nanorods, the fabrication and characterization of both axial and radial-type GaN/InGaN nanorod LEDs have been achieved. The precise control over nanorod geometry achiveable by this technique also enables single-mode single nanowire lasing with linewidths of less than 0.1 nm and low lasing thresholds of ~250kW/cm2.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
George T. Wang, Qiming Li, Jonathan Wierer, Jeffrey Figiel, Jeremy B. Wright, Ting S. Luk, and Igal Brener "Top-down fabrication of GaN-based nanorod LEDs and lasers", Proc. SPIE 8278, Light-Emitting Diodes: Materials, Devices, and Applications for Solid State Lighting XVI, 827816 (6 February 2012); https://doi.org/10.1117/12.909377
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Cited by 3 scholarly publications.
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KEYWORDS
Nanorods

Light emitting diodes

Nanowires

Gallium nitride

Etching

Nanolithography

Wet etching

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