Paper
3 May 2013 Global sensitivity analysis of the XUV-ABLATOR code
Václav Nevrlý, Jaroslav Janků, Jakub Dlabka, Michal Vašinek, Libor Juha, Luděk Vyšín, Tomáš Burian, Ján Lančok, Jan Skřínský, Zdeněk Zelinger, Petr Pira, Jan Wild
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Abstract
Availability of numerical model providing reliable estimation of the parameters of ablation processes induced by extreme ultraviolet laser pulses in the range of nanosecond and sub-picosecond timescales is highly desirable for recent experimental research as well as for practical purposes. Performance of the one-dimensional thermodynamic code (XUV-ABLATOR) in predicting the relationship of ablation rate and laser fluence is investigated for three reference materials: (i) silicon, (ii) fused silica and (iii) polymethyl methacrylate. The effect of pulse duration and different material properties on the model predictions is studied in the frame of this contribution for the conditions typical for two compact laser systems operating at 46.9 nm. Software implementation of the XUV-ABLATOR code including graphical user's interface and the set of tools for sensitivity analysis was developed. Global sensitivity analysis using high dimensional model representation in combination with quasi-random sampling was applied in order to identify the most critical input data as well as to explore the uncertainty range of model results.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Václav Nevrlý, Jaroslav Janků, Jakub Dlabka, Michal Vašinek, Libor Juha, Luděk Vyšín, Tomáš Burian, Ján Lančok, Jan Skřínský, Zdeněk Zelinger, Petr Pira, and Jan Wild "Global sensitivity analysis of the XUV-ABLATOR code", Proc. SPIE 8777, Damage to VUV, EUV, and X-ray Optics IV; and EUV and X-ray Optics: Synergy between Laboratory and Space III, 87770C (3 May 2013); https://doi.org/10.1117/12.2017542
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KEYWORDS
Silica

Extreme ultraviolet

Laser ablation

Silicon

Polymethylmethacrylate

Data modeling

Pulsed laser operation

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