Calculation of the dynamic characteristics of micro-mirror element based on thermal micro-actuators

Sergey S. Evstafyev; Sergey P. Timoshenkov; Vyacheslav K. Samoilykov; Natalia E. Korobova; Alexey S. Timoshenkov; Anatolij M. Tereshhenko

doi:10.1117/12.2202444

22 December 2015 Calculation of the dynamic characteristics of micro-mirror element based on thermal micro-actuators

Sergey S. Evstafyev, Sergey P. Timoshenkov, Vyacheslav K. Samoilykov, Natalia E. Korobova, Alexey S. Timoshenkov, Anatolij M. Tereshhenko

Author Affiliations +

Proceedings Volume 9668, Micro+Nano Materials, Devices, and Systems; 966823 (2015) https://doi.org/10.1117/12.2202444
Event: SPIE Micro+Nano Materials, Devices, and Applications, 2015, Sydney, New South Wales, Australia

Abstract

Paper presents a structure of a micro-mirror element driven by thermal micro-actuators. Micro-mirror dimensions are 100x100 um and it was manufactured by a surface micromachining using microelectronics technologies. Thermal microactuator is a bimorph structure consisting of aluminum and silicon dioxide layers with a polysilicon heater between them. The description of manufacturing process for micro-mirror element is given. The micro-mirror motion is achieved by passing an electric current through the heater. The actuator structure is heated and rotates the mirror. The processes of heating and cooling of thermal micro-actuator structure directly affects the characteristics of manufactured micro-mirror, thus the studying of these processes is essential. The report proposes a method for calculating the heating and cooling time, taking into account the influence of the structure geometry, electrical characteristics of external influence and the environment conditions. Also a method for the experimental determination of the dynamic characteristics is proposed, along with the method of electro-thermal analogy. The results of calculation are in good agreement with the experimental data, which allows one to use it to determine the dynamic characteristics of micro-devices based on thermal microactuators.

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Sergey S. Evstafyev, Sergey P. Timoshenkov, Vyacheslav K. Samoilykov, Natalia E. Korobova, Alexey S. Timoshenkov, and Anatolij M. Tereshhenko "Calculation of the dynamic characteristics of micro-mirror element based on thermal micro-actuators", Proc. SPIE 9668, Micro+Nano Materials, Devices, and Systems, 966823 (22 December 2015); https://doi.org/10.1117/12.2202444

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KEYWORDS

Actuators

Chemical elements

Silicon

Aluminum

Microactuators

Mirrors

Silica

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