Prof. Natalia E. Korobova Profile

Prof. Natalia E. Korobova

Lead Researcher at National Research Univ of Electronic Technology

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Author

Publications (11)

Proceedings Article | 15 March 2019 Paper

Concept of glass formation in chalcogenide systems and the possibility of predicting new compounds for micro- and nanoelectronics

Natalia Korobova, Sergey Timoshenkov, Viktor Minaev

Proceedings Volume 11022, 110221H (2019) https://doi.org/10.1117/12.2521720

KEYWORDS: Glasses, Chalcogenides, Binary data, Chemical elements, Tellurium, Chemical species, Gallium, Thallium, Crystals, Switches

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Proceedings Article | 30 December 2016 Paper

Some important aspects in the glass structure of chalcogenide systems

Viktor Minaev, Sergey Timoshenkov, Natalia Korobova, Viktor Kalugin

Proceedings Volume 10224, 102240G (2016) https://doi.org/10.1117/12.2266801

KEYWORDS: Glasses, Chalcogenides, Tellurium, Selenium, Binary data, Crystals, Liquid crystals, Chemical elements, Liquids, Germanium

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Proceedings Article | 23 September 2016 Paper

Electro-optical and physic-mechanical properties of colored alicyclic polyimide

V. Kravtsova, M. Umerzakova, N. Korobova, S. Timoshenkov, V. Timoshenkov, S. Orlov, R. Iskakov, O. Prikhodko

Proceedings Volume 9939, 99390R (2016) https://doi.org/10.1117/12.2236929

KEYWORDS: Transmittance, Dielectrics, Electro optics, Polymers, Heat treatments, Ultraviolet radiation, Thermography, Dysprosium, Resistance, Active optics

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Proceedings Article | 22 December 2015 Paper

Calculation of the dynamic characteristics of micro-mirror element based on thermal micro-actuators

Sergey Evstafyev, Sergey Timoshenkov, Vyacheslav Samoilykov, Natalia Korobova, Alexey Timoshenkov, Anatolij Tereshhenko

Proceedings Volume 9668, 966823 (2015) https://doi.org/10.1117/12.2202444

KEYWORDS: Aluminum, Silica, Mirrors, Actuators, Silicon, Chemical elements, Microactuators

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Proceedings Article | 22 May 2015 Paper

Comb structure analysis of the capacitive sensitive element in MEMS-accelerometer

Andrew Shalimov, Sergey Timoshenkov, Natalia Korobova, Maxim Golovinskiy, Alexey Timoshenkov, Egor Zuev, Svetlana Berezueva, Andrey Kosolapov

Proceedings Volume 9467, 94672W (2015) https://doi.org/10.1117/12.2176815

KEYWORDS: Microelectromechanical systems, Capacitance, Chemical elements, Computer aided design, Algorithm development, Bridges, Analytical research, Capacitors, Sensors, Molecular bridges

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Proceedings Article | 21 May 2015 Paper

Research and development of capacitive transducer with linear acceleration

Natalia Korobova, Elena Kochurina, Sergey Timoshenkov, Yuriy Chaplygin, Stepan Anchutin, Andrey Kosolapov

Proceedings Volume 9517, 951725 (2015) https://doi.org/10.1117/12.2181202

KEYWORDS: Transducers, Silicon, Sensors, Manufacturing, Anisotropic etching, Etching, Magnesium, Capacitance, Microelectromechanical systems, Analog electronics

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Proceedings Article | 21 May 2015 Paper

Features design and manufacturing technology in microelectromechanical encapsulated devices

O. Britkov, S. Timoshenkov, N. Korobova, S. Shepelev, A. Mikheev

Proceedings Volume 9517, 95171Z (2015) https://doi.org/10.1117/12.2180923

KEYWORDS: Gyroscopes, Silicon, Microelectromechanical systems, Chemical elements, Manufacturing, Annealing, Sensors, Infrared spectroscopy, Design for manufacturability, Etching

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Proceedings Article | 18 December 2014 Paper

Optically transparent fluoro-containing polyimide films with low dielectric permeability

V. Kravtsova, M. Umersakova, R. Iskakov, O. Prikhodko, N. Korobova

Proceedings Volume 9440, 944003 (2014) https://doi.org/10.1117/12.2180429

KEYWORDS: Polymers, Dielectrics, Transmittance, Ultraviolet radiation, Refractive index, Transparency, Microelectronics, Composites, Visible radiation, Reflectivity

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Proceedings Article | 16 September 2014 Paper

Enhanced stability of Bi-doped Ge2Sb2Te5 amorphous films

S. Dyussembayev, O. Prikhodko, K. Tsendin, S. Timoshenkov, N. Korobova

Proceedings Volume 9200, 920014 (2014) https://doi.org/10.1117/12.2059257

KEYWORDS: Bismuth, Switching, Crystals, Sputter deposition, Annealing, Semiconductors, Thin films, Doping, Atomic force microscopy, Absorption

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Proceedings Article | 5 September 2014 Paper

Error angle determination of the star sensor with liquid cooling

N. Korobova, P. Razzhivalov, V. Kalugin, S. Timoshenkov, E. Artemov

Proceedings Volume 9200, 920015 (2014) https://doi.org/10.1117/12.2059260

KEYWORDS: Star sensors, Liquids, 3D modeling, Thermal modeling, Computer aided design, Mathematical modeling, Thermography, Solid modeling, Intelligence systems, Instrument modeling

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Proceedings Article | 8 January 2013 Paper

Design and fabrication of piezoelectric MEMS

Natalya Korobova, Venyamin Vodopyanov, Sergey Timoshenkov

Proceedings Volume 8700, 87000R (2013) https://doi.org/10.1117/12.2016968

KEYWORDS: Ferroelectric materials, Microelectromechanical systems, Sol-gels, Platinum, Crystals, Electrodes, Silicon, Particles, Ceramics, Deposition processes

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Showing 5 of 11 publications

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