Metasurface integration into thin-film piezoelectric MEMS: realizations of a tunable waveplate and a tunable lens

Christopher Dirdal; Paul Thrane; Firehun Dullo; Jesil Jose

doi:10.1117/12.3016912

11 June 2024 Metasurface integration into thin-film piezoelectric MEMS: realizations of a tunable waveplate and a tunable lens

Christopher Dirdal, Paul Thrane, Firehun Dullo, Jesil Jose

Author Affiliations +

Proceedings Volume PC12990, Metamaterials XIV; PC1299003 (2024) https://doi.org/10.1117/12.3016912
Event: SPIE Photonics Europe, 2024, Strasbourg, France

Abstract

We present two ultra-compact optical components realized by piezoelectric MEMS actuation of metasurfaces: (i) a dynamic waveplate allowing for full birefringence control, and (ii) a novel ultra-compact tunable lens. Integrating metasurfaces with thin-film Piezoelectric lead Zirconate Titanate (PZT) allows for large mechanical displacements (10-70μm) (i.e. capable of strong optical modulations) or fast actuation (⪆ 1kHz), both at low voltage (⪅ 30V) and ultra-low power (50-100nW at 23V). These components are enabling within a wide range of medical applications. A demonstration of our dynamic waveplate for enabling increased contrast under polarimetric mapping of ex-vivo tissue samples will be given.

Conference Presentation

Citation Download Citation

Christopher Dirdal, Paul Thrane, Firehun Dullo, and Jesil Jose "Metasurface integration into thin-film piezoelectric MEMS: realizations of a tunable waveplate and a tunable lens", Proc. SPIE PC12990, Metamaterials XIV, PC1299003 (11 June 2024); https://doi.org/10.1117/12.3016912

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available