Dr. Alex Salnik Profile

Dr. Alex Salnik

Director, Technology Alliances and Partnerships at KLA Corp

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Publications (2)

Proceedings Article | 2 June 2003 Paper

Real-time optical CD metrology for litho process

Jon Opsal, Youxian Wen, Joungchel Lee, Walter Smith

Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.487605

KEYWORDS: Semiconducting wafers, Critical dimension metrology, Photoresist materials, Metrology, Reticles, Finite element methods, Wafer-level optics, Inspection, Etching, Cadmium

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Proceedings Article | 2 June 2003 Paper

Contact hole inspection by real-time optical CD metrology

Jon Opsal, Hanyou Chu, Youxian Wen, Guangwei Li, Yia-Chung Chang

Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.487607

KEYWORDS: Inspection, Critical dimension metrology, Semiconducting wafers, Optical inspection, Diffraction, Scattering, Microelectronics, Oxides, Spectroscopy, Silicon

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