Silicon photonics has been largely developed as a platform to address the future challenges in several applications including datacom, sensing or optical communications, among others. However, the properties of silicon itself is not enough to overcome all limitations in terms of speed, power consumption and scalability. New strategies have then been encouraged based on the hybrid integration of new materials in the silicon photonics platform. In this paper, we will introduce the recent advances in the hybrid integration of doped crystalline-oxides on silicon and silicon nitride waveguides. Especially, Yttria-stabilized zirconia (YSZ) with a lattice parameter compatible with the silicon lattice has been considered because it exhibits promising linear and nonlinear optical properties: low propagation loss, no two photon absorption (TPA) due to its large bandgap energy, a large transparency window from the ultraviolet to the mid-infrared and a good Kerr effect. Furthermore, YSZ can be doped with many dopants to develop active photonic devices with strong second- and third-order nonlinearities and light emission. We have recently demonstrated propagation loss in YSZ waveguides as low as 2dB/cm at a wavelength of 1380 nm, a nonlinear refractive index (Kerr effect) comparable with the SiN coefficient and light amplification in Er3+ doped YSZ on SiN waveguides. The recent results are very promising to pave the way for the development of low cost and low power consumption devices.
The strong evolution of silicon photonics towards very low power consumption circuits leads to the development of new strategies for photonic devices, especially for power-hungry components such as optical modulators. One strategy is to use Pockels effect in Si waveguides. However, bulk Si is a centrosymmetric semiconductor, which cannot exhibit any second order optical nonlinearities. Nonetheless, under a strain gradient, generated by depositing a stressed layer on Si waveguides, this restriction vanishes. In our work, we experimentally demonstrated a Pockels effect based electro-optic modulation at high frequency (> 5GHz) using a strained silicon Mach-Zehnder modulator.
New optical materials for hybrid photonic integration on silicon platform have become a hot research topic aiming at providing additional functionalities. In this regard, functional oxides are a very interesting class of materials due to their singular properties. Material engineering is commonly employed to tune and manipulate such properties at will, thus being functional oxides often used to build active reconfigurable elements in complex systems. Transparent oxides with moderate refractive indexes are targeted for hybrid integration due to the rewarding benefits envisioned. Yttria-Stabilized Zirconia (YSZ) is a chemically stable oxide1 with a transparency range that spans from the visible to the mid-IR2, with a refractive index around 2.1, which makes this functional oxide interesting for the development of low-loss waveguides when grown over a low contrast substrate. While these optical properties are very interesting for various applications, including on-chip optical communications and sensing, YSZ has remained almost unexplored in photonics up to now. Nevertheless, this complex functional oxide shows interesting optical properties such as low-moderate propagation losses of 2 dB/cm at telecom wavelengths3.
In our work, we explore the deposition of erbium doped YSZ by pulsed layer deposition (PLD) on a multilayer approach providing outstanding luminescence in correspondence with C-band of telecommunication window (λ=1530 nm) and in the visible range by means of up-conversion processes. The optical properties of active layers of Er-doped YSZ grown on waveguides in different platforms and under resonant pumping will be discussed in this paper, as well as their propagation losses. Based on the preliminary study of these active hybrid systems, we envision light amplification functionalities based on rare-earth doped functional oxides.
Silicon photonics is being considered as the future photonic platform for low power consumption optical communications. However, Silicon is a centrosymmetric semiconductor, which cannot exhibit any second order optical nonlinearities, like second harmonic generation nor the linear electro-optic effect (i.e. Pockels effect). Nonetheless, by means of strain gradients, generated by depositing a stressed layer (typically SiN) on silicon waveguides, this restriction vanishe. Hence, for years, many attempts on characterizing the second order nonlinear susceptibility tensor through Pockels effect have been performed. However, due to the semiconductor nature of silicon, its analysis has been wrongly carried out. Indeed, carriers in Si, at the Si/SiN interface and in SiN have a screening effect when performing electro-optic modulation, which have led to overestimations of the second order nonlinear susceptibility and eventually rose a controversy on the real existence of Pockels effect in strained silicon waveguides. Here, we report on unambiguous experimental characterization of Pockels effect in the microwave domain, by taking advantage of the inherent limitation of carrier effect in high frequency range. Recent results on high-speed measurements will be presented and discussed. Both charge effects and Pockels effect induced under an electric field will be also analysed.
Functional oxides are a very interesting class of materials due to their singular properties. Material engineering is commonly employed to tune and manipulate such properties at will, thus being functional oxides often used to build active reconfigurable elements in complex systems. In this regard, Yttria-Stabilized Zirconia (YSZ) stands as an interesting material since it has stable thermal and chemical properties and offers a wide transparency range from the visible to the mid-IR wavelength range. Moreover, it has a moderate refractive index of 2.1 which provides a good potential for the development of low-loss waveguides when grown over a low contrast substrate. While these optical properties are very interesting for various applications, including on-chip optical communications and sensing, YSZ has remained almost unexplored in photonics. In this regard, we recently demonstrated YSZ waveguides with propagation losses as low as 2 dB/cm at a wavelength of 1380 nm3. Based on the encouraging preliminary results, we have recently explored the possibility to introduce active rare-earth dopants into YSZ waveguides to demonstrate on-chip optical amplifiers based on YSZ. This work explores the introduction of Er3+ ions using a multilayer approach deposited by pulsed laser deposition (PLD) technique, providing outstanding luminescence around λ = 1.55 μm, in correspondence with C-band of telecommunications. Such active layers have been grown onto different platforms, including SiNx and sapphire. The optical properties of Er-doped YSZ waveguides under resonant pumping and its propagation losses will be discussed in this paper. These results pave the way towards the implementation of new rare-earth-doped functional oxides into hybrid photonic platforms in a customized and versatile manner, adding novel light amplification functionalities.
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