Dr. Amey Walke
at imec
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 20 March 2019 Paper
N. Collaert, A. Alian, B. De Jaeger, U. Peralagu, A. Vais, A. Walke, L. Witters, H. Yu, E. Capogreco, K. Devriendt, T. Hopf, K. Kenis, G. Mannaert, A. Milenin, A. Peter, F. Sebaai, L. Teugels, D. van Dorp, K. Wostyn, N. Horiguchi, N. Waldron
Proceedings Volume 10963, 1096305 (2019) https://doi.org/10.1117/12.2511746
KEYWORDS: Germanium, Gallium nitride, Gallium arsenide, CMOS technology, Field effect transistors, Fin field effect transistors, Group III-V semiconductors

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