Mr. Andre Garman Profile

Andre Garman

at Photronics Inc

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Publications (1)

Proceedings Article | 20 November 2024 Poster + Paper

Critical dimension advanced statistical process control closed-loop system in photomask manufacturing

E. Vogiatzis, E. Bawden, J. Beineke, M. Goldberg, D. Kazlauskas, S. Pampel, R. Kutzy, J. Patel, C. Sullivan, H. Küllig, A. Wittig, R. Born, R. Schrader, S. Brosig, D. Paulick, P. Craig, H. Fryer, C. Cooke, G. Davies, L. Kreft, T. Schievelbein, M. Carrier, A. Garman, D. Lucas, M. Barnes, D. Wierzbicki, C. Progler

Proceedings Volume 13216, 132162P (2024) https://doi.org/10.1117/12.3031853

KEYWORDS: Manufacturing, Control systems, Process control, Photomasks, Statistical analysis, Databases, Critical dimension metrology, Advanced process control, Failure analysis, Visualization

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