Dr. Anjie Ming
at Institute of Microelectronics
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 7 February 2006 Paper
Proceedings Volume 6032, 60320O (2006) https://doi.org/10.1117/12.667874
KEYWORDS: Collimators, Mirrors, Optical switching, Microopto electromechanical systems, Packaging, Etching, Switches, Silicon, Optics manufacturing, Anisotropic etching

Proceedings Article | 30 December 2004 Paper
Jingqiu Liang, Zichun Le, Liangqiang Peng, Weibiao Wang, Weihua Lan, Anjie Ming, Futing Yi, Jian Ye, Bisheng Quan, Jinsong Yao, Ming Xuan, Lijun Wang
Proceedings Volume 5641, (2004) https://doi.org/10.1117/12.570760
KEYWORDS: X-rays, Polymethylmethacrylate, X-ray lithography, Photomasks, X-ray technology, Photoresist materials, Manufacturing, Electroplating, X-ray optics, Absorption

Proceedings Article | 30 December 2004 Paper
Proceedings Volume 5641, (2004) https://doi.org/10.1117/12.570729
KEYWORDS: Silicon, Microopto electromechanical systems, Etching, Mirrors, Optical switching, Packaging, Micromirrors, Single mode fibers, Switches, Optical components

Proceedings Article | 20 August 2004 Paper
Jingqiu Liang, Zichun Le, Weibiao Wang, Liangqiang Peng, Weihua Lan, Anjie Ming, Jian Ye, Bisheng Quan, Jinsong Yao, Ming Xuan, Lijun Wang
Proceedings Volume 5446, (2004) https://doi.org/10.1117/12.557781
KEYWORDS: Photomasks, Excimer lasers, Laser ablation, X-rays, X-ray lithography, Ultraviolet radiation, Photoresist materials, Polymers, Gold, Scanning electron microscopy

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