Dr. Anton Chavez Profile

Dr. Anton Chavez

at DuPont Electronics & Industrial

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Publications (3)

Proceedings Article | 13 June 2022 Presentation

Improving wet etch resistance of organic underlayers

Anton Chavez, Iou-Sheng Ke, Sabrina Wong, Shintaro Yamada

Proceedings Volume PC12055, PC1205508 (2022) https://doi.org/10.1117/12.2612350

KEYWORDS: Wet etching, Resistance, Metals, Etching, Tin, Image processing, Titanium, Polymers, Polymer thin films, Plasma

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Proceedings Article | 22 February 2021 Presentation + Paper

Reducing the absorbance of a high etch resistant spin-on carbon hardmask

Anton Chavez, Iou-Sheng Ke, Sabrina Wong, Curtis Williamson, Li Cui, Paul LaBeaume, Jim Cameron, Shintaro Yamada

Proceedings Volume 11612, 116120F (2021) https://doi.org/10.1117/12.2583630

KEYWORDS: Etching, Absorbance, Carbon, Resistance, System on a chip, Reactive ion etching, Polymers, Image processing, Photoresist materials, Optical lithography

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Proceedings Article | 23 March 2020 Paper

Design considerations for high etch resistance spin-on carbon underlayers

Li Cui, Iou-Sheng Ke, Anton Chavez, Keren Zhang, Paul LaBeaume, Suzanne Coley, Shintaro Yamada, Jim Cameron, Lei Zhang, William Marshall, Benjamin Foltz

Proceedings Volume 11326, 113261N (2020) https://doi.org/10.1117/12.2552024

KEYWORDS: System on a chip, Polymers, Etching, Resistance, Carbon, Polymer thin films, X-rays, FT-IR spectroscopy, Reactive ion etching

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