Dr. Ashutosh Rathi
at Siemens EDA
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 12 October 2021 Presentation + Paper
Proceedings Volume 11855, 118550S (2021) https://doi.org/10.1117/12.2601786
KEYWORDS: Optical proximity correction, SRAF, Photomasks, Lithography, Manufacturing

Proceedings Article | 23 March 2020 Paper
Proceedings Volume 11327, 1132709 (2020) https://doi.org/10.1117/12.2551829
KEYWORDS: Optical proximity correction, SRAF, Resolution enhancement technologies, Lithography, Model-based design, Manufacturing, Pattern recognition

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