AlGaN is a leading candidate for current and future ultra-wide bandgap electronic and optoelectronic applications. However, 3D etch technologies for AlGaInN remain immature compared to silicon, limiting its full potential for novel devices. Here, we build from the foundation of anisotropic KOH-based wet etchants used to fabricate GaN structures and explore AlGaN alloys etched in acids and bases. We investigate the etch reactivity of AlGaN alloys as a function of Al content in various etchants. We then explore the etch evolution of novel nanostructures observed and discuss possible mechanistic explanations. Lastly, we look at field emission properties of AlGaN alloys.
Solid-state, vacuum nanoelectronic devices have the potential to combine the advantages of vacuum electron devices, such as robustness in harsh environments and high frequency operation, and solid-state devices, such as size, integrability, and low-power operation. In this work, we demonstrate novel GaN nanogap field emission diodes that operate in air and exhibit ultra-low turn-on voltage, high field emission current, and excellent on-off ratio. We present experimental and modeling results on the field emission characteristics of these devices at various nanogap sizes and operating pressures. These results provide critical new insights into the behavior of this new class of devices and point to future challenges and opportunities. Sandia National Laboratories is managed and operated by NTESS under DOE NNSA contract DE-NA0003525.
Solid-state, vacuum nanoelectronic devices have the potential to combine the advantages of vacuum electron devices, such as robustness in harsh environments and high frequency operation, and solid-state devices, such as size, integrability, and low-power operation. In this work, we demonstrate novel GaN nanogap field emission diodes that operate in air and exhibit low turn-on voltage, high field emission current, and excellent on-off ratio. We present experimental and modeling results on the field emission characteristics of these devices at various nanogap sizes and operating pressures. These results provide critical new insights into the behavior of this new class of devices and point to future challenges and opportunities. Sandia National Laboratories is managed and operated by NTESS under DOE NNSA contract DE-NA0003525.
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