Mr. Ben S. Flavel Profile

Ben S. Flavel

at Flinders Univ

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Proceedings Article | 20 December 2006 Paper

Nanosphere lithography using thermal evaporation of gold

B. Flavel, J. Shapter, J. Quinton

Proceedings Volume 6415, 64151J (2006) https://doi.org/10.1117/12.695409

KEYWORDS: Nanostructures, Photomasks, Gold, Mica, Optical spheres, Lithography, Scanning electron microscopy, Annealing, Crystals, Atomic force microscopy

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Nanosphere lithography, which allows for the fabrication of patterned metal surfaces, is a simple, effective and unconventional technique that exploits a self-assembly process. Using this technique, polystyrene nanospheres with diameters of 500nm, and 100nm were assembled onto a 'muscovite' mica substrate in a hexagonally close packed monolayer array, to provide a physical mask for material deposition. Thermal evaporation was subsequently used to deposit gold through the nanosphere mask layer, to generate a periodic array of gold nanostructures. Upon changing the mask to a multi-layered array of nanospheres, slightly more complex nanostructures were achieved. However due to thermal evaporation being a high temperature process the nanostructures obtained deviated from their predicted quasi triangular shape due to a slight annealing of the polystyrene mask.

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