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Bernd Kagerer
Dir. of Technical Mkt. at NanoFocus AG
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Publications (1)
Proceedings Article | 4 June 2002 Paper
3D-confocal microscopy for surface analysis of microstructured materials
Bernd Kagerer, Rainer Brodmann, Juergen Valentin, Jan Filzek, Uwe Popp
Proceedings Volume 4773, (2002) https://doi.org/10.1117/12.469201
KEYWORDS: Confocal microscopy, Microscopes, Sensors, Metals, Objectives, 3D metrology, Microscopy, Interferometry, Standards development, Radium
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