Ms. Carol Bibiana Rojas Hurtado Profile

Carol Bibiana Rojas Hurtado

at Physikalisch-Technische Bundesanstalt

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Publications (2)

Proceedings Article | 24 May 2018 Presentation + Paper

Determination of structural deviations in wire grid polarizers for DUV application wavelengths by transmission spectroscopy in the visible spectral range

T. Siefke, W. Dickmann, T. Weichelt, M. Steinert, J. Dickmann, C. B. Rojas Hurtado, B. Bodermann, S. Kroker

Proceedings Volume 10678, 106780O (2018) https://doi.org/10.1117/12.2306026

KEYWORDS: Polarizers, Transmittance, Deep ultraviolet, Double patterning technology, Visible radiation, Ion beams, Etching, Spectroscopy, Chromium, Polarization

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Proceedings Article | 26 June 2017 Paper

Simulation of the influence of line edge roughness on the performance of deep ultraviolet wire grid polarizers

Thomas Siefke, Carol Rojas Hurtado, Johannes Dickmann, Martin Heusinger, Stefanie Kroker

Proceedings Volume 10330, 103300S (2017) https://doi.org/10.1117/12.2269602

KEYWORDS: Refractive index, Finite-difference time-domain method, Tungsten, Ion beams, Etching, Deep ultraviolet, Polarization, Modeling, Line edge roughness, Polarizers, Optical metrology, Polarization control

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