Dr. Chia-Ming Chang
at PsiQuantum Corp
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 19 February 2014 Paper
Proceedings Volume 9010, 90100G (2014) https://doi.org/10.1117/12.2044159
KEYWORDS: Waveguides, Silicon, Oxides, Etching, Semiconducting wafers, Cladding, Silicon photonics, Reflectors, Optical interconnects, Oxidation

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