Chih-Hung Wu
at Industrial Technology Research Institute
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 13 November 2002 Paper
Jung-Yan Huang, Hung-Yin Tsai, Chih-Hung Wu, Chia-Ching Su, Chin-Hon Fan
Proceedings Volume 4936, (2002) https://doi.org/10.1117/12.469434
KEYWORDS: Etching, Electrochemical etching, Surface roughness, Silicon, Plasma etching, Wet etching, Resistance, Micromachining, Semiconducting wafers, Microelectromechanical systems

Proceedings Article | 28 October 1992 Paper
Chih-Chung Wu, Tsung-Ming Yang, Huei-Yuan Shih, Jia-Chung Chen
Proceedings Volume 1816, (1992) https://doi.org/10.1117/12.131336
KEYWORDS: Semiconductor lasers, Hydrogen fluoride lasers, Modulation, Electro optics, Denoising, Optical discs, Molybdenum, Computing systems, Electromagnetic coupling, Temperature metrology

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