Dr. Chih-Shang Liu Profile

Dr. Chih-Shang Liu

at Industrial Technology Research Institute

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Author

Publications (5)

Proceedings Article | 30 December 2019 Paper

The microscope type spectral reflectometry design for large dynamic range thin film thickness measurement in RDL processes

Hsiang-Chun Wei, Chung-Lun Kuo, Chih-Shang Liu

Proceedings Volume 11200, 112003N (2019) https://doi.org/10.1117/12.2541896

KEYWORDS: Microscopes, Reflectivity, Reflectometry, Thin films, Spectroscopy, Ultraviolet radiation

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Proceedings Article | 26 September 2016 Paper

The design of microscope type spectral reflectometry for the depth measurement of high-aspect-ratio through silicon via

Hsiang-Chun Wei, Chun-Wei Lo, Chih-Shang Liu

Proceedings Volume 9961, 99610L (2016) https://doi.org/10.1117/12.2238042

KEYWORDS: Microscopes, Reflectometry, Silicon, Thin films, Inspection, Critical dimension metrology, Reflectivity, Scanning electron microscopy, Reflection, Oxides

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Proceedings Article | 10 September 2009 Paper

Multi-channel liquid crystal cell parameter measurement technique

Chih-Shang Liu, Kai-Ping Chuang, Yeo-Sung Lin, Ming-Yin Zhuang, Chih-Jung Chiang

Proceedings Volume 7432, 743217 (2009) https://doi.org/10.1117/12.827084

KEYWORDS: Liquid crystals, Polarization, Spectrographs, Polarizers, Hyperspectral imaging, LCDs, Data modeling, Refractive index, Collimation, Imaging systems

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Proceedings Article | 15 September 2005 Paper

Variable optical pulse generation for synchronization of high speed computing signals

Chih-Shang Liu, Li-Chiang Hu, Shyh-Lin Tsao

Proceedings Volume 5907, 590707 (2005) https://doi.org/10.1117/12.614701

KEYWORDS: Mode locking, Modulation, Fiber lasers, Modulators, Clocks, Optical amplifiers, Mirrors, Optical clocks, Nonlinear optics, Fiber amplifiers

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Proceedings Article | 6 February 2004 Paper

Time response of a phase-modulated mode-locked figure-eight fiber laser

Shyh-Lin Tsao, Chih-Shang Liu, Huang-Cuang Lin

Proceedings Volume 5210, (2004) https://doi.org/10.1117/12.505759

KEYWORDS: Mode locking, Modulation, Fiber lasers, Optical amplifiers, Modulators, High speed photography, Amplitude modulation, Polarization, Frequency modulation, Optical isolators

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