Mr. Chiung-Kun Huang Profile

Chiung-Kun Huang

at Macronix International Co., Ltd.

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Publications (1)

Proceedings Article | 10 April 2024 Poster + Paper

Global tilt extraction for BEOL contact landing displacement control

Yung-Yi Lin, Tien-Jung Lee, Hsiao-Fei Su, Yen-Hung Liu, Chao-Yu Cheng, Christopher Liman, Boxue Chen, Zhengquan Tan, Yuan-Chieh Chiu, Chiung-Kun Huang, Ying-Hung Liang, Hong-Ji Lee, Nan-Tzu Lian

Proceedings Volume 12955, 1295532 (2024) https://doi.org/10.1117/12.3010726

KEYWORDS: X-rays, Semiconducting wafers, Etching, Metrology, 3D metrology, Back end of line, Scattering, 3D modeling, Transmission electron microscopy, Optical alignment

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