Dr. Chong Yue Profile

Dr. Chong Yue

at Tianjin Univ

SPIE Involvement:

Author

Publications (7)

Proceedings Article | 11 October 2024 Paper

Study on the intelligent valuation technique of step height standards based on atomic force microscopy

Chong Yue, Weifen He, Jun Xiong, Xin Chen, Kun Jiang

Proceedings Volume 13278, 132780U (2024) https://doi.org/10.1117/12.3032361

KEYWORDS: Atomic force microscopy, Standards development, Histograms, Calibration, Metrology, Equipment, Atomic force microscope, Inspection, Semiconductors, Measurement devices

Read Abstract +

Proceedings Article | 4 April 2023 Paper

Research on measurement method of submicron linewidth based on microscopic vision

Chong Yue, YueQing Ding, Lei Tao, Xin Chen, Jin Zhou

Proceedings Volume 12617, 1261770 (2023) https://doi.org/10.1117/12.2666760

KEYWORDS: Image processing, Digital filtering, Technology, Nonlinear filtering, Image filtering, Hough transforms, Calibration, Computing systems, Standards development, Imaging systems

Read Abstract +

Proceedings Article | 4 April 2023 Paper

Measurement of optical constants of nano-film based on ellipsometric data at visible wavelength

Chong Yue, YueQing Ding, Lei Tao, Jin Zhou, Xin Chen

Proceedings Volume 12617, 126176Y (2023) https://doi.org/10.1117/12.2666758

KEYWORDS: Particle swarm optimization, Ellipsometry, Refractive index, Particles, Thin films, Evolutionary algorithms, Thin film devices, Optical testing, Mathematical optimization, Reflection

Read Abstract +

Proceedings Article | 23 January 2023 Paper

Determination the characteristic parameter of nano-film based on spectroscopic ellipsometry by improved adaptive genetic algorithm

Chong Yue, YueQing Ding, Lei Tao, Sen Zhou, Long Chen

Proceedings Volume 12556, 125561Q (2023) https://doi.org/10.1117/12.2651860

KEYWORDS: Genetic algorithms, Optimization (mathematics), Ellipsometry, Refractive index, Thin films, Spectroscopic ellipsometry, Reflection, Silicon films, Silicon, Polarization

Read Abstract +

Proceedings Article | 23 January 2023 Paper

Determination of bimetallic film’s thickness and optical constants based on SPR phase detection

Chong Yue, Yueqing Ding, Lei Tao, Sen Zhou, Long Chen

Proceedings Volume 12556, 125561P (2023) https://doi.org/10.1117/12.2651767

KEYWORDS: Metals, Thin films, Prisms, Multilayers, Reflectivity, Surface plasmons, Spiral phase plates, Spectroscopy, Phase shift keying, Inverse problems

Read Abstract +