Mr. Chris P. McNorgan Profile

Chris P. McNorgan

at Univ of Western Ontario

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Proceedings Article | 29 August 2017 Paper

Novel ion implantation based method for surface patterning

Chris McNorgan

Proceedings Volume 10313, 1031315 (2017) https://doi.org/10.1117/12.2283837

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Recently, there has been much attention focused on photonic crystals and photonic bandgap materials [1]. The fabrication of these materials requires the formation of a periodic variation in the refractive index on a submicrometer length scale. It is anticipated that these structures will provide the building blocks required for future photonic devices and photonic integrated circuits. Applications are envisaged for structures with both 2- and 3-dimensional periodicity. In this communication we report results from a novel variant of ion beam lithography. The approach involves ion implantation through a mask of silica microspheres, followed by selective chemical etching.

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