Dr. Chunguang Suo
at Harbin Institute of Technology
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 21 April 2006 Paper
Xiaowei Liu, Chunguang Suo, Yufeng Zhang, Xuebin Lu, Hongyang Xia
Proceedings Volume 6186, 61860T (2006) https://doi.org/10.1117/12.662487
KEYWORDS: Silicon, Electrodes, Picosecond phenomena, Electroless plating, Microelectromechanical systems, Microfabrication, Wet etching, Platinum, Semiconductor lasers, Optical lithography

Proceedings Article | 21 April 2006 Paper
Yufeng Zhang, Xiaowei Liu, Chunguang Suo, Xuebin Lu, Hongyang Xia
Proceedings Volume 6186, 61860U (2006) https://doi.org/10.1117/12.662351
KEYWORDS: Silicon, Semiconducting wafers, Microelectromechanical systems, Oxygen, Micromachining, Platinum, Electrons, Silica, Etching, Gold

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