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Claudia Tagbo
at Physikalisch-Technische Bundesanstalt
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Publications (2)
Proceedings Article | 26 March 2019 Paper
Photon detector calibration in the EUV spectral range at PTB
C. Laubis, A. Babalik, A. Babuschkin, A. Barboutis, C. Buchholz, A. Fischer, S. Jaroslawzew, J. Lehnert, H. Mentzel, J. Puls, A. Schönstedt, M. Sintschuk, C. Stadelhoff, C. Tagbo, F. Scholze
Proceedings Volume 10957, 109571L (2019) https://doi.org/10.1117/12.2514933
KEYWORDS: Sensors, Calibration, Extreme ultraviolet, Photodiodes, Diodes, CCD image sensors, Photodetectors, Charge-coupled devices, X-ray detectors
Proceedings Article | 9 October 2018 Paper
Spatially resolved reflectometry for EUV optical components
Frank Scholze, Andreas Fischer, Claudia Tagbo, Christian Buchholz, Victor Soltwisch, Christian Laubis
Proceedings Volume 10809, 108091U (2018) https://doi.org/10.1117/12.2501774
KEYWORDS: Extreme ultraviolet, Transmittance, Reflectometry, Reflectivity, Mirrors, Optical components, Extreme ultraviolet lithography
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