Dr. Congpeng Zhang Profile

Dr. Congpeng Zhang

at North China Univ of Technology

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 31 December 2008 Paper

Error measuring, modeling, and compensation of precision motion table driven by linear motors

Congpeng Zhang, Xueke Luo, Qiang Liu

Proceedings Volume 7130, 71305D (2008) https://doi.org/10.1117/12.819753

KEYWORDS: Motion models, Nerve, Motion measurement, Error analysis, Lithography, Manufacturing equipment, Interferometers, Process modeling, Temperature metrology, Neural networks

Read Abstract +

Precise air-bearing motion table is widely used in the lithography machine and other semiconductor manufacturing equipments. In this paper, a high performance H-type air-bearing XY motion table driven by linear motors was introduced and its positioning error measuring, modeling and compensation were studied. Firstly, the main error sources and types of the motion table were analyzed. Secondly, applying laser-vector-measurement technique, positioning errors in the X and Y directions were measured by laser interferometer. Then the composite error models of three linear motors in the H-type stage were built by different methods, including piecewise linear models, B-spline curve models and artificial nerve network models. According to the structure characteristic, the difference between the one-dimension (1-D) and two-dimension (2-D) error model and compensation effect were studied. Lastly, some error compensation experiments were carried out based on different error models. The experimental results show that positioning error in X and Y directions were decreased to less than 1µm through error correction, which can fulfill the micron level precision requirement in industry, the B-spline model and BP nerve network model had better error forecast ability than the piecewise linear model, and the 2-Derror model has better compensation effect than 1-D model.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years