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Conor N. Martin
at BluGlass Ltd
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 15 February 2008 Paper
Modeling and experimental analysis of RPCVD based nitride film growth
C. Martin, K. S. Butcher, M. Wintrebert-Fouquet, A. Fernandes, T. Dabbs, P. P.-T. Chen, R. Carmen
Proceedings Volume 6894, 689407 (2008) https://doi.org/10.1117/12.762537
KEYWORDS: Gallium nitride, Glasses, Plasma, Sapphire, Metals, Scanning electron microscopy, Nitrogen, Crystals, Chemical vapor deposition, Metalorganic chemical vapor deposition
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