Ms. Danielle Durrant Profile

Danielle Durrant

at IBM Corp

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Publications (2)

Proceedings Article | 22 February 2021 Presentation + Paper

Process trace analytics for process development

Robert Baseman, Fateh Tipu, Sebastian Englemann, John Papalia, Matthew Sagianis, Scott DeVries, Danielle Durrant, Sebastian Naczas, Vinay Pai, Shanti Pancharatnam

Proceedings Volume 11615, 116150J (2021) https://doi.org/10.1117/12.2583645

KEYWORDS: Analytics, Data processing, Sensors, Semiconducting wafers, Process control, Manufacturing, Time metrology, Statistical analysis, Semiconductor manufacturing, Metrology

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Proceedings Article | 28 March 2017 Paper

Driving down defect density in composite EUV patterning film stacks

Luciana Meli, Karen Petrillo, Anuja De Silva, John Arnold, Nelson Felix, Richard Johnson, Cody Murray, Alex Hubbard, Danielle Durrant, Koichi Hontake, Lior Huli, Corey Lemley, Dave Hetzer, Shinichiro Kawakami, Koichi Matsunaga

Proceedings Volume 10143, 101430Y (2017) https://doi.org/10.1117/12.2260146

KEYWORDS: Extreme ultraviolet, Optical lithography, Coating, Composites, Manufacturing, Inspection, Semiconducting wafers, Scanning electron microscopy, Extreme ultraviolet lithography, Defect detection, Laser scattering, Air contamination

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