Devin Ramdutt
at Australian National Univ
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 16 February 2005 Paper
Devin Ramdutt, Rodney Lui, Kerrie Davies, Rod Boswell, Cristobal dos Remedios, Christine Charles, Marcela Bilek, David McKenzie
Proceedings Volume 5651, (2005) https://doi.org/10.1117/12.582580
KEYWORDS: Silicon, Polymers, Etching, Plasma, Plasma etching, Semiconducting wafers, Proteins, Fluorine, Gases, Ions

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