Dr. Dmitry Levko Profile

Dr. Dmitry Levko

at Esgee Technologies Inc

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Publications (1)

Proceedings Article | 13 June 2022 Presentation

VizGlow-MPS: a multi-fidelity process simulator for fast, yet accurate, semiconductor process design and optimization

Dmitry Levko, Rochan Upadhyay, Kenta Suzuki, Chandrasekhar Shukla, Laxminarayan Raja

Proceedings Volume PC12056, PC1205606 (2022) https://doi.org/10.1117/12.2614241

KEYWORDS: Semiconductors, Plasma, Process engineering, Process modeling, Ions, Very large scale integration, Tolerancing, Semiconductor process engineering, Gases, Etching

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