In this paper, an auto-focusing system based on image processing is introduced to realize auto-focusing. Image processing method like differential coefficient, maximum variance is involved in the system to pick up the information of the edges, and the statistical rules of the information under different focusing states are used to control the focus to obtain the best focusing state. The system can automatically read the distance information of the worktable and drive the pacing motor to reach the aim of auto-focusing. This auto-focusing system is loaded on the original CCD-based microscopic measuring system an the practical measuring example is given, and it is pointed out that the way mentioned before of heightening the precision is available. It is pointed out that the higher resolution, higher precision image collection board, the CCD camera with higher resolution and the higher precision pacing motor will make the auto-focusing and the measurement of the system more accurate. It can be practical applied an the further perfection of algorithm and software will result in the system having more functions.
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