Emma L. Fowler
at Univ of Texas at Dallas
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 1 May 2023 Presentation + Paper
Ehud Fuchs, James Owen, Afshin Alipour, Emma Fowler, S. O. Reza Moheimani, John Randall
Proceedings Volume 12497, 124970G (2023) https://doi.org/10.1117/12.2661599
KEYWORDS: Lithography, Scanning tunneling microscopy, Electron beam lithography, Microelectromechanical systems, Actuators, Scanners, Silicon, Control systems, Quantum fields, Electrons

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