Many applications across photonics and semiconductor industries require the fabrication of nanostructures with non-trivial geometries with a precision and reproducibility down to the nanometer scale. Slanted gratings and metamaterials are examples of such designs that have vast applications in Augmented Reality and LiDAR. State-of-the-art lithography techniques, such as nanoimprint lithography or UV lithography, can provide such levels of fabrication precision for high-volume production. However, a rapid in-line quality inspection method for such complex patterns is required to monitor the fabrication process, verify the sample quality, and to ensure reproducibility. Here, we demonstrate a novel technique that allows us to inspect the quality of the samples in a non-destructive and fast manner, and to extract geometrical parameters of the nanostructures over large areas, generating spatial variations maps across wafers.
We demonstrate the strong coupling between excitons in organic molecules and all-dielectric metasurfaces supporting Mie surface lattice resonances (MSLRs). MSLRs have extended mode volumes and large quality factors, which enables to achieve collective strong coupling with large coupling strengths and Rabi energies. Moreover, due to the electric and magnetic character of the MSLR given by the Mie resonance, we show that the hybridization of the exciton with the MSLR results in exciton-polaritons that inherit this character as well. Our results demonstrate the potential of all-dielectric metasurfaces as novel platform to investigate and manipulate exciton-polaritons in low-loss polaritonic devices.
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