Silicon nanowires (SiNWs) have undergone intensive research for their application in novel integrated systems such as
field effect transistor (FET) biosensors and mass sensing resonators profiting from large surface-to-volume ratios (nano
dimensions). Such devices have been shown to have the potential for outstanding performances in terms of high
sensitivity, selectivity through surface modification and unprecedented structural characteristics. This paper presents the
results of mechanical characterization done for various types of suspended SiNWs arranged in a 3D array. The
characterization has been performed using techniques based on atomic force microscopy (AFM). This investigation is a
necessary prerequisite for the reliable and robust design of any biosensing system. This paper also describes the applied
investigation methodology and reports measurement results aggregated during series of AFM-based tests.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.