The presented x-y stage measurement unit uses 2 linear cross mounted stages, where the stages are mounted on a heavy aluminum holder to ensure low vibrations and precise repeatable positions. The travel range in x and y direction is 52 mm resulting in a 52 mm x 52 mm scan area. The lowest step size in x and y direction is ▵x = ▵y = 0.2 μm. The software LabView controls with a computer the 2 stages and as well as the detector to ensure a fully automated set-up. After implementing, mounting and testing all components of this measurement unit repeatability tests were performed with a red LED array as source. 40 different measurements (step size ▵x = ▵y = 1.0 mm over full 52 mm x 52 mm) were taken under same conditions. A statistical analysis, results in a low uncertainty of < 0.06 % (1 standard deviation) as maximum deviation. This shows the high precision reached with this developed fully automated measurement unit..
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